等离子体溅射对微型钻头表面ta-C涂层结合特性及摩擦性能的影响
罗春峰 胡健 陈成 屈建国
等离子体溅射对微型钻头表面ta-C涂层结合特性及摩擦性能的影响
Effect of Plasma Sputtering on Adhesion Characteristics and Friction Properties of ta-C Coatings on Micro Drills
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