<strong><span style="font-size:18px;">阴极弧蒸发和高功率脉冲磁控溅射TiAlN涂层的性能研究</span></strong>

硬质合金 ›› 2023, Vol. 40 ›› Issue (3) : 181-186.

阴极弧蒸发和高功率脉冲磁控溅射TiAlN涂层的性能研究

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Research on Properties of TiAlN Coatings Prepared by Cathode Arc Evaporation and High-Power Impulse Magnetron Sputtering

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{{article.zuoZheCn_L}}. {{article.title_cn}}. {{journal.qiKanMingCheng_CN}}. 2023, 40(3): 181-186

{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2023, 40(3): 181-186

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