Influence of Substrate Bias on Microstructure, Mechanical and Tribological Properties of TiAlSiN Thin Films Deposited by Magnetron Sputtering

Zhou Shiyu Cao Fuyang Guan Qingfeng

Cemented Carbide Cemented Carbide ›› 2020, Vol. 37 ›› Issue (4) : 273-279.

Influence of Substrate Bias on Microstructure, Mechanical and Tribological Properties of TiAlSiN Thin Films Deposited by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2020, 37(4): 273-279

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